Traceable metrology of soft X-ray to IR optical constants and nanofilms for advanced manufacturing
A Joint Research Project within the European Metrology Research Programme EMPIR.
Advanced Traceable Metrology
for Optical Constants
Next generation materials and ultra-thin films with tailored optical properties for integrated circuits will rely on innovations in nanotechnologies. Knowledge of their properties is key for innovations based on size-dependent material parameters with an increasing importance placed on quantum effects. Photonic measurement methods in the soft-X ray to IR wavelength range that approach theoretical limits need better traceability coupled with rigorous uncertainty estimations to provide the tools needed to characterise novel optical materials. Whilst the mathematical modelling approaches these rely on require improvement to increase technique applicability.
In this EMPIR project, advanced mathematical and optical measurement methods are being developed to enable traceability of soft X-ray to IR optical constants and nanofilms.
The joint research project was started in July 2021 for a duration of 36 months.